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- Acoustic mode search in material systems of crystal acoustics (incl. thin films and fluids) and calculation of all relevant parameters
- Extraction of material properties from BAW and SAW measurements
- Calculation of COM parameters for SAW device simulation (surface impedance methods
- SAW device simulation on base of different methods and models (surface impedance method, BAW based models)
- FEM simulation of SAW systems
- 2D & 3D CAD
- Thin film deposition tailored to thin film deposition on piezo- and pyroelectric substrates for magnetron sputtering, e-beam evaporation, ALD and sample pre-/post-treatment
- Rapid-prototyping laser and e-beam lithography
- Thermal treatment (4.2K…>1000°C)
- Acoustic techniques, incl. high-precision Pulse-Echo, LAwave (high-precision material characterization (bulk, thin films, temperature dependence)), Brillouin light scattering, UHF Laser Doppler vibrometry with long-term stabilization and capability for high temperature measurements
- Electric techniques, incl. RF vector network analysis (< 26 GHz; high T, inert atmosphere, vacuum), impedance/gain phase analyzers, digitizing oscilloscopes, vdPauw
- other techniques, incl. 2D thin film stress measurement, SEM, Particle / aerosol / dispersion analysis, electrical and mechanical thin film and bulk parameters (resistivity, polarization, pyroelectricity, hardness, thickness), high precision measurement of bulk sample mass densitity (single crystals etc.)
- Gas flow cryostats equipped for dielectric and ultrasonic measurements in the temperature range 4.2 K - 350 K
- Various ovens for thermal treatment and measurement up to 1600°C under different atmospheric conditions (vacuum, inert gas, forming gas)
- Customized lifetime (TTF) measuring setups for SAW devices
- Diverse pump setups, including syringe pumps (Cetoni neMESYS), pressure pumps (Fluigent LineUP, Bartels mp6), peristaltic pumps
- Valves, flow sensors, PDMS and DFR setups
- Custom acoustofluidic setups for fast & simple chip exchange
- Dedicated RF signal sources for actuation
- Optical fluoreszence microscopes (inverse or non-inverse)
- Digital optical microscope (Keyence VHX 7000) and high-speed camera (Ametek VEO 410)
