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- Acoustic mode search in arbitrary anisotropic materials and layered systems (incl. crystals, piezoelectrics, thin films and fluids) and calculation of all relevant microacoustic parameters
- Extraction of material properties from BAW and SAW measurements
- Calculation of COM parameters for SAW device simulation (surface impedance method)
- SAW device simulation on base of different methods and models (COM based)
- FEM simulation of SAW systems with dedicated powerful workstations / clusters
- 2D (QCAD, KLayout) & 3D CAD (Solid Works)
- Rapid-prototyping laser (MLA) and e-beam (Reith Voyager) lithography
- Thin film deposition tailored to thin film deposition on piezo- and pyroelectric substrates for magnetron sputtering, e-beam evaporation, ALD and sample pre-/post-treatment
- Various ovens for thermal treatment up to 1600°C under different atmospheric conditions (vacuum, inert gas, forming gas)
- 3D printing (FFF, LCD-Epoxy)
- Support by IFW workshop (e.g. CNC, wire-cutting, etc.)
- Microacoustic techniques, incl. high-precision Pulse-Echo and LAwave technique for high-precision material characterization (bulk, thin films, temperature dependence), Brillouin spectroscopy, UHF Laser-Doppler vibrometry with long-term stabilization and capability for in situ high temperature measurements
- Electric techniques, incl. RF vector network analysis (< 26 GHz; high T, inert atmosphere, vacuum), impedance/gain phase analyzers, digitizing oscilloscopes, vdPauw
- other techniques, incl. 2D thin film stress measurement, SEM, Particle / aerosol / dispersion analysis, electrical and mechanical thin film and bulk parameters (polarization, pyroelectricity, thickness), high precision measurement of bulk sample mass densitity (single crystals etc.)
- Gas flow cryostats equipped for dielectric and ultrasonic measurements in the temperature range 4.2 K - 350 K
- Various ovens for measurement up to 1600°C under different atmospheric conditions (vacuum, inert gas, forming gas)
- Customized lifetime (TTF) measuring setups for SAW devices
- Diverse pump setups, including syringe pumps (Cetoni neMESYS), pressure pumps (Fluigent LineUP, Bartels mp6), peristaltic pumps
- Valves, flow sensors, PDMS and DFR setup components
- Custom acoustofluidic setups for fast & simple chip exchange
- Dedicated RF signal sources and accessories (e.g. high-power and pulsation drivers)
- Custom miniaturized and portable optical microscopy setups
- Optical fluoreszence microscopes (inverse or non-inverse)
- Digital optical microscope (Keyence VHX 7000) and high-speed camera (Ametek VEO 410)
